C,H,N and O in Si and Characterization and Simulation of Materials and Processes Cover

C,H,N and O in Si and Characterization and Simulation of Materials and Processes

ISBN/ASIN: 9780444824134,9780444596338,044459633X | 1996 | English | pdf | 564/564 pages | 135 Mb
Publisher: Elsevier | Author: A. Borghesi, U.M. Gösele, J. Vanhellemont, A.M. Gué and M. Djafari-Rouhani (Eds.)

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C,H,N and O in Si and Characterization and Simulation of Materials and Processes

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