Handbook of Ion Beam Processing Technology - Principles, Deposition, Film Modification and Synthesis Cover

Handbook of Ion Beam Processing Technology – Principles, Deposition, Film Modification and Synthesis

ISBN/ASIN: 9780815517573,9780815511991 | 1989 | English | pdf | 446/536 pages | 23.1 Mb
Publisher: William Andrew Publishing/Noyes | Author: Cuomo, Jerome J.; Rossnagel, Stephen M.; Kaufman, Harold R.(eds.)

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

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