Laser Microfabrication. Thin Film Processes and Lithography Cover

Laser Microfabrication. Thin Film Processes and Lithography

ISBN/ASIN: 9780122334306,0122334302,9780080918020,0080918026 | 1989 | English | pdf | 584/584 pages | 11.5 Mb
Publisher: Elsevier Science | Author: Daniel J. Ehrlich and Jeffrey Y. Tsao (Eds.)

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

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