Particles in Gases and Liquids 1: Detection, Characterization, and Control Cover

Particles in Gases and Liquids 1: Detection, Characterization, and Control

ISBN/ASIN: 9781461280859,9781461307938 | 1989 | English | pdf | 312/297 pages | 5.15 Mb
Publisher: Springer US | Author: Douglas W. Cooper (auth.), K. L. Mittal (eds.) | Edition: 1

This book documents the proceedings of the Symposium on Particles in Fluids: Detection, Characterization and Control held as a part of the 18th Fine Particle Society meeting in Boston, August 3-7, 1987. This was the Premier symposium on this topic and the response was so good that we have decided to organize it on a biennial basis and the second symposium will be held under the rubric Particles in Gases and Liquids: Detection, Characterization and Control at the 20th Fine Particle Society meeting in Boston, August 22-26, 1989. In the modern manufacture of sophisticated and sensitive microelectronic components and other precision parts, there has been a great deal of concern about yield losses due to micrometer- and submicrometer-sized particles. These particles can originate from a number of sources including fluids, i. e. , gases and liquids used in the manufacturing process. So the detection, characterization and control or removal of these undesirable particles is of cardinal importance and this symposium was conceived and o~ganized with this in mind. The purposes of this symposium were to bring together those actively involved in all aspects of particles in fluids, to provide a forum for discussion of the latest techniques for the detection, characterization and control of particles, and to highlight areas which needed intensified R&D efforts. The printed program contained a total of 46 papers and a variety of topics dealing with various ramifications of particles in fluids were presented.

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Particles in Gases and Liquids 1: Detection, Characterization, and Control

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