PVD for Microelectronics  Sputter Deposition Applied to Semiconductor Manufacturing Cover

PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing

ISBN/ASIN: 9780125330268 | 1999 | pdf | 1-419/419 pages | 24.1 Mb
Publisher: Academic Press, Elsevier | Author: Ronald A. Powell and Stephen M. Rossnagel (Eds.)

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